Surface micromachining builds microstructures by deposition and etching structural layers over a substrate. This is different from Bulk micromachining, in which a silicon substrate wafer is selectively etched to produce structures.
What is meant by micromachining?
: the removing (as in drilling, planing, or shaping) of small amounts of material (such as metal) by action other than that of a sharp-edged tool micromachining done with an electron beam.
What is micro machining process?
Micromachining is the process of machining very small parts with tools smaller than 0.015 inch in diameter and tolerances of just a few tenths. Micromachining can create very small and intricate parts that are required for certain applications, particularly in the semiconductor and medical industry.
What are different types of micromachining?
ELECTRIC DISCHARGE MICROMACHINING (EDMM)
WIRE EDM , EDDG, ELID.
LASER BEAM MICROMACHINING (LBMM)
ELECTRON BEAM MICROMACHINING (EBMM)